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| Specifications | sdr.indb |
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| Specifications | sdr.indb |
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| Content | Perfluorinated Compounds (PFCs) PFCs are chemicals that are transformed through industrial processes into ‘greenhouse gases’ that trap heat in the earth’s atmosphere and contribute to climate change. The unit used to measure their impact is known as the global warming potential. PFCs are very stable and remain in the atmosphere for long periods of time. However, they are non-toxic and do not damage the ozone layer. PFCs are widely used in the semiconductor industry during the production of silicon wafers for CVD chamber cleaning and etching processes. Several types of PFCs are used with global warming potentials ranging from 6,500 to 23,000 times the CO2 equivalent. The World Semiconductor Council (WSC), in which ST leads the European participation regarding the use of PFCs, has set a challenging goal of reducing the aggregate of absolute PFC emissions to 10% below 1995 levels by 2010. ST has set its own internal target for PFCs, which is to reduce its emissions to 10% of 1995 levels (reduction by a factor of 10) per unit of production by 2008, two years before the WSC deadline. ST participates in the European PFC task force, within which 19 companies have agreed to share all technical information on PFCs and to report their progress and results according to the international standards developed by the IPCC (Intergovernmental Panel for Climate Change). In 1997 we made a similar commitment by signing the US Memorandum of Understanding with the EPA (Environmental Protection Agency). ST’s PFC road map. There are a number of technical ways in which PFC emissions can be reduced. In 1998 we created company-wide and individual site road maps (revised in 2000) for all our Front End plants to set out how we will achieve our ambitious target for PFCs. The measures we identified to cut emissions include more efficient process ‘recipes’ (the blend of chemicals used), the use of alternative chemicals and the installation of abatement systems capable of destroying the PFCs almost completely. The tests we carried out indicated that abatement systems are the most effective way of reducing emissions. Results in the reduction of PFC emissions. As we reported last year, since embarking on our PFC mission, ST has managed to cut the emission rate, expressed in Kg of carbon equivalent per wafer, by 53% compared with the 1995 baseline. This means that the production of 1 wafer in 2003 emitted roughly half the emissions compared to an equivalent wafer in 1995. However, our net emissions of PFCs in 2003 increased by 12.3% compared to 2002. This is clearly not a good result. 90 |
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