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Examples • Our Catania M5 site in Sicily has provided a number of examples of best practice, among which the installati

Specifications	sdr.indb
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Content	Examples • Our Catania M5 site in Sicily has provided a number of examples of best practice, among which the installation of a new dryer to reduce Isopropyl Alcohol (IPA) consumption. This dryer uses the ‘marangoni effect’ to carry out wafer rinse and dry operations, which avoids the use of IPA vapours at high temperatures. The saving can be estimated at 108kg per day, equivalent to $392 per day. • Our Agrate R2 site (Italy) has reduced the use of the Edge Removal solvent RER500 through a recipe change and process optimization. The reduction amounts to 65 tonnes of RER per year, saving over $400,000 annually. • Our Muar Back End plant in Malaysia has eradicated the use of H2S04 through a simpliﬁcation of the existing process resulting in a saving of 81,200 litres ($15,000) annually. Another improvement to the de-ionized water system produced savings of $21,000 per year. • Our Back End plant in Malta has drastically decreased its consumption of chemicals on a consistent basis over the last few years: by 58% in 2001 compared with 1998, and a further 24% in 2002 and 2003. The successful implementation of a number of different programs at the plant has cut the purchasing cost of chemicals by a factor of 4. Besides the obvious ﬁnancial beneﬁts, the reduction has reduced the health and safety risks relating to chemicals and improved overall working conditions. Health & safety and chemicals The management of chemicals has a direct impact on the health and safety of our employees. Our management of the health & safety risks relating to chemicals is presented in the section Our Workplace. Kg/wafer Front End Chemical Consumption (Baseline reference value of 100) 2000 2001 2002 0 20 40 60 80 100 120 2003 Consumption per waferTarget Kg/Million units Back End Chemical Consumption (Baseline reference value of 100) 2000 2001 2002 0 20 40 60 80 100 120 2003 Consumption per unit (ﬁnished product)Target Decalogue Reference Key Performance Indicators Year 2000200120022003 Chemicals Kg/wafer (Front End)100928681 Kg/Mill units (Back End)100432619 Baseline reference value of 100 Process Replacement Substitution Diluted ChemistriesOn site generation Recycling for reuse Total Chemical Management 99
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